Edge triggered calibration

ABSTRACT

Circuitry for measuring a propagation delay in a circuit path. The circuitry includes a one-shot edge triggered element that can be connected in a loop with the circuit path. An edge signal propagating through the circuit path triggers the one-shot element to output a pulse. The pulse propagates around the loop, again triggering the one-shot element to produce a pulse, creating a repeating series of pulses. The period between these pulses is influenced by propagation time of an edge through the loop such that a difference in the period with the circuit path connected and not connected in the loop indicates propagation delay in the circuit path. Such circuitry can be configured to independently measure, and therefore calibrate for, propagation delays associated with rising and falling edges. Calibration to separately equalize propagation delays for rising and falling edges can increase the timing accuracy of an automatic test system.

RELATED APPLICATIONS

This application claims the benefit under 35 U.S.C. §120 of U.S.application Ser. No. 13/433,154, entitled “EDGE TRIGGERED CALIBRATION”filed on Mar. 28, 2012, which is herein incorporated by reference in itsentirety.

BACKGROUND

Electronic components, such as semiconductor devices, are frequentlytested, sometimes multiple times during their manufacture, usingautomatic test equipment. To perform these tests, automated testequipment may include instruments that generate or measure test signalssuch that a range of operating conditions can be tested on a particulardevice. An instrument, for example, may generate or measure a pattern ofdigital signals to enable testing of digital logic within asemiconductor device.

Modern semiconductor devices may have large numbers of test points,possibly hundreds or even thousands. Accordingly, the test system mayhave multiple channels, each designed to independently generate ormeasure a signal for a test point. The specific value to be generated ormeasured at each test point may be dictated by a test program thatcontrols all of the channels of the test system. In addition tospecifying the value of a test signal, the test program may specify atime at which the test signal is to be applied or measured. Being ableto control the timing of test signals is important for thorough testingof a semiconductor device because a device that produces an expectedvalue, but at the wrong time, can nonetheless cause a system using thatsemiconductor device to malfunction.

The time at which a test signal is to be applied or measured at one testpoint may be specified in relation to the time at which a test signal isapplied or measured at another test point. Accordingly, it is frequentlynecessary that the test signals in multiple channels be coordinated.Test systems are designed to synchronize the generation of signalswithin different channels. Though, merely synchronizing the times atwhich signals are generated may not be adequate to ensure the testsignals are coordinated at the test points of the device under test.Differences in propagation delay can change the relative timing ofsignals, thereby affecting the accuracy of test results. To increasetesting accuracy, it is known to calibrate a test system. Calibrationmay entail measuring relative propagation delays through channels of thetest system. The propagation delay through the channels can then beadjusted. Such calibration may be done at various times, including whena test system is manufactured or, once a test system is installed, on aperiodic schedule or at times depending on an amount of use.

SUMMARY

Delays associated with either the falling or rising trigger edge of anelectronic signal on an electronic signal path may be measured. In someembodiments, delay measurement circuitry may be configured toselectively measure either edge. Such circuitry may be used toseparately measure the delay of a rising and falling edge, allowingcalibration to adjust these edge-specific delays separately.

In some embodiments, delay measurement circuitry may include anedge-triggered element that responds to either a rising trigger edge ora falling trigger edge. The delay measurement circuitry may includeswitching elements such that the edge triggered element can beselectively coupled to the circuit path so as to form a loop. A periodmeasuring element may be coupled to the loop.

In operation, an edge sent through the circuit path may trigger theedge-triggered element causing it to generate a pulse, or signal inanother format, that includes another trigger edge. That edge may besent through the circuit path, looping back to the edge-triggeredelement to generate yet a further edge. This operation in a loop may setup a repeating sequence of edges generated by the edge-triggeredelement, separated in time by an amount that depends on the propagationdelay of the edge through the circuit path. By measuring the timebetween those edges, such as with the period measuring element,information about the propagation delay through the circuit path can beobtained.

Accordingly, in one aspect, the invention relates to apparatus fordetermining delay along at least one circuit path. The apparatuscomprises circuitry configured to form a loop containing the at leastone circuit path. The circuitry comprises an edge-triggered element anda period measuring element coupled to the loop. The edge-triggeredelement responds only to either a rising trigger edge or falling triggeredge, but not both, of a signal in the loop.

In another aspect, the invention relates to a method for measuringedge-specific delay along at least one circuit path. The method includesconnecting a circuit path of the at least one circuit path in at leastone loop. A first frequency at which a first

type pulse traverses a loop of the at least one loop may be measured.The pulse of the first type may be generated synchronously with a firstedge of a signal traversing the circuit path. A second frequency atwhich a second type pulse traverses a loop of the at least one loop mayalso be measured. The pulse of the second type being generatedsynchronously with a second edge of a signal traversing the circuitpath.

In some embodiments, such a delay measurement technique may be used tocalibrate a test system used in the manufacture of semiconductordevices, improving the process of manufacturing the semiconductordevices.

In yet a further aspect, the invention relates to an integrated circuit.The integrated circuit comprises a circuit path with a calibrationelement. Calibration circuitry is connectable in a loop incorporatingthe circuit path. That calibration circuitry includes an edge-triggeredelement and circuitry configured to measure a rate at which a signaledge propagates around the loop.

The foregoing is a non-limiting summary of the invention, which isdefined by the attached claims.

BRIEF DESCRIPTION OF DRAWINGS

The accompanying drawings are not intended to be drawn to scale. In thedrawings, each identical or nearly identical component that isillustrated in various figures is represented by a like numeral. Forpurposes of clarity, not every component may be labeled in everydrawing. In the drawings:

FIG. 1A is a schematic illustration of an exemplary embodiment of anautomatic test system;

FIG. 1B is a schematic illustration of an exemplary embodiment of aportion of an automatic test system illustrating multiple signal pathsthat may be calibrated based on edge-sensitive measurements of delay;

FIG. 2 is a schematic illustration of an exemplary embodiment ofcalibration circuitry within an automatic test system using conventionaldelay measurement techniques;

FIG. 3 is a schematic illustration of an exemplary embodimentcalibration circuitry to calibrate for edge-sensitive delay;

FIG. 4 is a sketch of a timing diagram showing a comparison of theoperation of a standard SR flip-flop and a true edge triggered SRflip-flop, that may be used in implementing a one shot edge triggeredelement of FIG. 3;

FIG. 5 is a truth table illustration operation of a true edge-triggeredSR flip-flop operating according to the timing sequence illustrated inFIG. 4;

FIG. 6 is a schematic illustration of a circuit implementation of a trueedge-triggered modified SR flip-flop operating according to the timingdiagram of FIG. 4;

FIG. 7A is a truth table illustrating operation of the Y-latchcomponents of FIG. 6;

FIG. 7B is a truth table illustrating operation of the Q-latch componentof FIG. 6; and

FIG. 8 is a schematic illustration of circuitry for measuringedge-sensitive delays that may be configured to measure delaysassociated with either a rising or falling edge.

DETAILED DESCRIPTION

The inventors have recognized and appreciated advantages of circuitryand methods for measuring edge-sensitive delays in an electronic system.The capability to measure edge-sensitive delays, for example, may beapplied in calibrating electronic circuitry for delays. The measurementsmay be used to adjust propagation delay through a circuit path for eachedge separately. Timing of either or both of a rising and falling edgemay be adjusted in this way.

For circuitry that responds to only one trigger edge, either a rising orfalling trigger edge, calibrating for the propagation delay of thetrigger edge can lead to more accurate operation. Conventional delaymeasurement techniques, particularly for circuit paths processingdifferential signals, tend to report an average edge propagation timefor both a rising and falling edge. Adjusting to provide a desiredaverage propagation delay for rising and falling edges combined does notnecessarily lead to accurate operation when the edges are usedseparately as trigger edges. The inventors have further recognized andappreciated that the difference between calibration based on propagationdelay of a trigger edge versus average delay of rising and falling edgescan have more of an impact as signal frequencies increase, because theperiod becomes smaller and inaccuracies associated with the trigger edgebecome a more significant percentage of the period. Such a scenario mayoccur within an automatic test system, which operates at highfrequencies in order to fully test many types of semiconductor devices.

Though, edge-sensitive delay measurements may be important in othercontexts. As another example, a pulse has both a rising and a fallingedge. If the rising and falling edges propagate through a circuit pathat different rates, the time between the rising and falling edge mayshrink or expand, leading to a change in the shape of the pulse, whichmay be undesirable in some scenarios.

Differences in propagation delay for rising and falling edges can arisein various ways. For example, differences can arise because of biaslevels used in a circuit path. As a specific example, the transistors ina differential input stage of a logic element may be biased such that atransistor that turns on in response to a rising edge turns on fasterthan a transistor that turns on in response to a falling edge. As aresult, the propagation delay of a rising edge may be less than thepropagation delay of a falling edge. In this case, adjusting the biaslevel can calibrate for edge-specific delays by equalizing the turn ontime for transistors that respond to rising and falling edges. Usingother techniques to then calibrate for average delays may lead to adesired propagation delay for both the rising and falling edges.Accordingly, calibration of the circuit path may include writing into anon-volatile memory a value that controls the bias level to equalizerising and falling edge delays instead of or in addition to using othercalibration techniques.

In some embodiments, the bias levels that are adjusted may representbias voltages. In other embodiments, the bias levels that are adjustedto alter edge-sensitive delays may be bias current levels. In additionto adjusting bias levels, other circuit parameters may be adjusted toadjust edge-sensitive delays. In some embodiments, known techniques maybe used, such as changing resistance or capacitance. When edge-sensitivedelay measurements are used as part of a calibration process, these andother techniques may be used to adjust one or more circuit parameters toaccount for edge-sensitive delays. Any suitable adjustment techniquesmay be used, and the specific adjustment techniques used in any circuitpath may depend on the design of the circuit path.

Such delay measurement and calibration techniques may be used in anysuitable type of electronic system, including in an automatic testsystem. In an automatic test system, there are multiple channels. Moreaccurate tests may be made if calibration techniques are used for eachchannel to ensure that differences in edge-sensitive delays do not leadto inaccuracies in the timing of operation to generate or measure testsignals in different channels.

FIG. 1A is a schematic illustration of an automatic test system in whichedge-sensitive delay calibration techniques may be applied based onedge-sensitive delay measurements. FIG. 1A illustrates a test system 100that contains multiple instruments, of which instruments 110A . . . 110Iare illustrated. Each of the instruments may contain circuitry togenerate and/or measure a test signal for a device under test 140. Thespecific function of each instrument is not crucial to the invention,and any suitable type of instruments may be used in test system 100.Instruments 110A, 110B . . . 110I, for example, may include multipletypes of instruments, with different ones of the instruments generatingor measuring different types of analog or digital signals.

It should be appreciated that FIG. 1A is a greatly simplifiedrepresentation of an automatic test system. For example, though noillustrated, test system 100 may include control circuitry that controlsoperation of instruments 110A . . . 110I. Additionally, test system 100may include processing circuitry to process measurements and determinewhether a device under test 140 is operating correctly. Moreover, itshould be appreciated that, though nine instruments 110A . . . 110I areillustrated, test system 100 may include any number of instruments orother resources for generating and/or measuring test signals. Further,though FIG. 1A illustrates a scenario in which a single device undertest 140 is being tested, automatic test system 100 may be configured totest multiple devices.

Regardless of the number of instruments or other components generatingor measuring test signals and the number of devices under test, testsystem 100 may include signal delivery components that route the signalsbetween the devices under test and the instruments. In the example ofFIG. 1A, the signal delivering components are illustrated as a bus 120and a device interface board 130. However, it should be appreciated thatthe signal delivery portions of test system 100 may include different oradditional components.

Test system 100 may be constructed in any suitable way, including usingtechniques as are known in the art.

Though greatly simplified, FIG. 1A illustrates a scenario in whichedge-sensitive calibration techniques may be used. Different signalsused in testing even a single device under test may propagate throughdifferent channels of the test system. Different channels may beimplemented using different ones of the instruments 110A . . . 110I suchthat different channels encompass different circuit paths throughdifferent components. Even when different channels are implemented inthe same instrument, the channels may have different circuit pathspassing through different components. Because different components indifferent circuit paths may have different amounts of delay, eachchannel may be subject to different amounts of delay.

FIG. 1B schematically illustrates a portion of two channels, 162A and162B. In this example, channels 162A and 162B may represent channels ina digital test instrument. Channels 162A and 162B may generate and/ormeasure a digital signal at an input/output (I/O) line 192A or 192B,respectively, coupled to device under test 140 (FIG. 1A). It should beappreciated that FIG. 1A shows two channels for simplicity. A digitaltest instrument may contain eight or more digital channels. Moreover, anautomatic test system may contain multiple digital instruments such thattest system 100 (FIG. 1A) may include hundreds or thousands of digitalchannels. Nonetheless, the illustration of channels 162A and 162Billustrates that the use of timing calibration can improve theperformance of an automatic test system.

In the example of FIG. 1B, the digital instrument includes a patterngenerating 160. Pattern generator 160 may be programmed, for each testto be executed, with a pattern of digital signals to generate or measurein each of channels 162A and 162B. Pattern generator 160 works inconjunction with a timing generator 170. In the example illustrated,pattern generator 160 may output values controlling each of the channelsin each of the multiple cycles of tester operation. The values mayindicate for each channel an operation of that channel associated withthe cycle. The values, for example, may indicate that circuitry withinthe channel is to drive an I/O line, such as output line 192A or 192B,coupled to a test point on a device under test. In addition, the outputof pattern generator 160 may indicate a value to drive on the I/O lines192A or 192B. Alternatively, the values output by pattern generator mayindicate that each channel is to measure a signal on the I/O lines 192Aor 192B.

Timing generator 170 may also be programmable. The programming of timinggenerator 170 may indicate when, relative to the start of each channel,the operation specified by the output of pattern generator 160 is tooccur.

To support these functions, each of the channels 162A and 162B includescircuitry to generate a test signal on an I/O line of the channel or tocompare the signal sensed on the I/O line to a value provided by patterngenerator 160. For example, channel 162A includes circuitry 180A forgenerating a test signal having a format specified by an output ofpattern generator 160. The time at which such a test signal is generatedmay be controlled by outputs of timing generator 170. This formattedtest signal may be passed through a buffer amplifier 188A or othersuitable circuitry to I/O line 192A. Channel 162B similarly includescircuitry 180B to generate a test signal in a specified format and abuffer 188B to drive an I/O line 192B.

Each channel includes comparison circuitry that may operate during testcycles in which pattern generator 160 specifies that a test signal onthe I/O line of a channel is to be measured. For example, comparecircuitry 184A may receive a value at I/O line 192A through a buffer190A. Compare circuitry 184A may compare that sense value to an expectedvalue provided to compare circuitry 184A by pattern generator 160. Thiscompare operation may occur at a time specified by one or more signalsoutput by timing generator 170. Accordingly, compare circuitry 184A mayproduce a value indicating whether input/outline 192A had an expectedvalue at a designated time.

Channel 162B similarly has compare circuitry 184B. Compare circuitry184B receives a value of a test signal at I/O line 192B through buffer190B. The timing of operation of compare circuitry 184B is similarlycontrolled by outputs of timing generator 170.

In this way, both the type of operations performed in each channel andtime at which those operations are performed may be specified by theprogramming of pattern generator 160 and timing generator 170. Thoughthe timing of operations in the different channels is specified from acommon timing source, timing generator 170 in this example, differencesin propagation delays may cause the operations programmed to occur atthe same time to actually occur at different times. FIG. 1B illustratesas a simple example that generate circuitry 180A is closer to timinggenerator 170 than compare circuitry 184B. As a result, a propagationdelay of a timing signal from timing generator 170 to comparatorcircuitry 184B may entail a delay of D₄. In contrast, the delay togenerate circuitry 180A may entail a delay D₁, which may be less thanD₄. Other components in other channels may have different amounts ofdelay. For example, the delay to comparator circuitry 184A may be D₂ andthe delay to generate circuitry 180B may be D₃.

In addition to delays in propagation of timing signals reaching thedifferent components, the circuits themselves may operate with differentpropagation delays. Random variations in the components used toimplement the circuitry illustrated in FIG. 1B may result in differentoperating speeds of those components. For example, generate circuitry180A may respond more rapidly to a command to drive a data value thangenerate circuitry 180B. These differences may exist, even though thecircuitry is designed to operate in the same way.

Differences in delay through different channels of an automatic testsystem may impact the accuracy of test results. For example, a test mayinvolve determining whether a device under test responds to an inputwithin a specified amount of time. To perform such a test, the inputsignal may be generated in one channel of the automatic test system. Forexample, channel 162A may be programmed to generate a desired input on adesired I/O line 192A. The response of the device under test may bemeasured in a different channel. For example, channel 162B may beprogrammed to measure the response on I/O line 192B. In this case,channel 162A may be programmed to generate the signal at a first timeand channel 162B may be programmed to measure the output to determinewhether the expected response occurred at a second time. The second timemay be programmed such that it occurs an amount of time after the firsttime that represents the expected response time of the device undertest. However, if there are different delays associated with channels162A and 162B, the intended time difference between the operationsperformed at channels 162A and 162B is not maintained. For example, ifthere is less delay in channel 162B than through channel 162A, theresponse of the device under test may be measured sooner relative to theapplied input than intended. Conversely, if the delay through channel162B is greater than the delay through 162A, the measurement may occurlater relative to the input than expected. Either case may result in aninaccurate test result because of the test system checking for anexpected result other than at the programmed time.

Accordingly, it is known in the art to include calibration circuitryassociated with the channels of an automatic test system. Techniques maybe used to measure delay through each channel and the calibrationcircuitry may be adjusted to change the amount of delay through eachchannel. Accordingly, FIG. 1B illustrates calibration circuitry at 182Aassociated with generate circuitry 180A. Calibrate circuitry 186A isshown associated with compare circuitry 184A. Likewise, calibrationcircuitry 182B and 186B is shown associated with generate circuitry 180Band 184B, respectively. In operation, relative delays through each ofthe channels may be measured and calibration values may be determinedand used to adjust calibration circuitry, such as calibration circuitry182A, 182B, 186A and 186B. The calibration values, for example, may bewritten as digital values stored in non-volatile memory or othersuitable storage structures within the calibration circuitry. Though, itshould be appreciated that any suitable adjustment techniques may beused in calibration circuitry in the different channels, including usingtechniques as are known in the art.

Regardless of how calibration values are applied to the circuitry, thevalues may be selected so as to equalize delays through the channels. Todetermine appropriate values, a technique may be employed to measurerelative delays in one or more channels. FIG. 2 illustrates conventionalcalibration circuitry that may be employed to measure relative delays.The calibration circuitry of FIG. 2 has a configuration sometimesdescribed as a Ring-oscillator Low Frequency, or “RLF,” loop. To measurea delay in a circuit path P₁, the circuit path is switch into a loop210. In this example, circuit path P₁ may be switched into loop 210 byappropriate configuration of switches S₁ and S₂. When circuit path P₁ isnot switched into loop 210, a circuit path P₀ may be connected in loop210.

In this example, path P₀ is shown to contain no circuit elements.Accordingly, while circuit path P₁ may include circuit elements thatintroduce a propagation delay when switched into loop 210, circuit P₀ isshown as introducing no delay and may act as a reference circuit path.Behavior of loop 210 may be measured with circuit path P₁ included inthe loop and without that circuit path in the loop. Accordingly, theeffect of circuit path P₁ on the operation of loop 210 may be determinedby measurements with circuit path P₁ switched into the loop and withcircuit path P₀ switched into the loop. The difference between thesemeasurements may indicate an effect of circuit path P₁. Specifically,the difference may represent a delay introduced by switching path P₁into the loop.

In this example, path P₀ is shown to contain no circuit elements. PathP₀ serves as a reference path P such that delays introduced by otherpaths may be measured in relation to the amount of delay introduced bypath P₀. It should be appreciated that relative delays may be measuredregardless of whether path P₀ introduces a delay. Accordingly, thespecific makeup of reference path P₀ is not critical to operation of thedelay measurement circuit illustrated in FIG. 2.

In the example of FIG. 2, the characteristic of loop 210 that ismeasured is the amount of time required for a signal to propagate aroundloop 210. A signal may be initiated in the loop in any suitable way. Insome embodiments, a signal, such as a pulse, may be injected into loop210 by an input element, not expressly illustrated in FIG. 2. In otherembodiments, loop 210 may be inherently unstable such that a signal maybe initiated by electronic noise in loop 210 without any express input.

Regardless of the manner in which a signal is initiated in the loop,other components of the loop 210 may be configured to maintain thesignal propagating around loop 210. The other components, in thisexample, include a delay chain 212. Delay chain 212 is made of inverters212 ₁, 212 ₂ and 212 ₃. Though three inverters are shown, it should beappreciated that any suitable number of inverters may be included indelay chain 212. Further, though inverters are shown, it should beappreciated that any suitable components may be included in delay chain212.

In this example, the elements in delay chain 212 are selected such thata signal input to delay chain 212 produces an output of delay chain 212that is inverted, and when applied at the input of circuit path P₁causes circuit path P₁ to again output a signal that is invertedrelative to its original output. Repeating the same process once moreleads to an output signal of circuit path P₁ that is of the samepolarity as its original output. This process may repeat indefinitely,with the signal and its inverse periodically passing any specific pointin loop 210, with a period equal to the sum of the propagation delayaround the loop of a rising edge and the propagation delay of a fallingedge. The time between signals appearing at any specific point willdepend on the propagation delay of the signal around loop 210.

With circuit path P₁ switched into loop 210, the period between signalswill be longer than when reference circuit path P₀ is switched into loop210. By measuring a change in the period of the signal when path P₁ isincluded in the loop relative to when reference circuit path P₀ isincluded in the loop, the increase in delay associated with switchingcircuit path P₁ into the loop may be determined.

The amount of delay will be related to the increase in the period of thesignal passing through loop 210. To measure the period, the calibrationcircuitry of FIG. 2 includes a period counter 220. Period counter 220may be implemented in any suitable way. In this example, period counter220 is a counter that is clocked by a signal leaving delay chain 212. Todetermine the period, the counter may be operated for a known intervalof time. That interval, divided by the number of the signal countedgives an indication of the time between signals passing around loop 210.

Delay chain 212 may be constructed in any suitable way to ensure that asignal exiting circuit path P₁, which is then input to delay chain 212,causes an output of delay chain 212 that can be applied to circuit pathP₁ to cause it to regenerate the signal. In the embodiment illustrated,delay chain 212 includes an odd number of inverter elements. Thisconfiguration inverts the input to circuit path P₁, which inverts theoutput of circuit path P₁. This operation may be appropriate if circuitpath P₁ outputs a non-inverted version of the signal in response to theinverted input. Though, it should be appreciated that the delay chain212 may have any suitable configuration and the specific configurationmay be selected based on the operation of circuit path P₁.

The calibration operation may be controlled by any suitable circuitry.In this example, calibration processor 230 is illustrated. Calibrationprocessor 230 may represent a circuit component incorporated into anautomatic test system. Alternatively or additionally, calibrationprocessor 230 may be implemented as part of a general purpose computerprogrammed to operate a test system, such as test system 100 (FIG. 1A).

Regardless of the specific implementation of calibration processor 230,calibration processor 230 may operate to connect reference path P₀ intoloop 210 and control period counter 220 to measure the period of signalsoscillating within loop 210. Calibration processor 230 may capture thisvalue and then operate switches S₁ and switches S₂ to disconnectreference path P₀ from loop 210 and connect circuit path P₁ in loop 210.Calibration processor 230 may then again read the output of periodcounter 220. By comparing the outputs of period counter 220 withreference path P₀ and circuit path P₁ in loop 210, calibration processor230 may determine an amount of delay, relative to a reference amount ofdelay, associated with circuit path P₁. Calibration processor 230, basedon this calculated amount of delay, determines one or more calibrationvalues for circuit path P₁. Calibration processor 230 may be programmedto compute the calibration values such that, when applied to circuitpath P₁, the delay through circuit path P₁ achieves some nominal value.Calibration processor 230 may compute the calibration values in anysuitable way, including through an iterative process under whichcalibration processor 230 programs different calibration values intocircuit path P₁ until the measured delay equals the nominal value.

Though not expressly shown in FIG. 2, the calibration circuitry may beconfigured to connect multiple circuit paths within loop 210.Calibration processing may entail setting calibration values for eachpath to achieve equal delays in all circuit paths. In this way,compensation may be provided for different propagation delays, switchingspeeds or other effects that could impact propagation delay differentlyin different ones of the circuit paths.

The calibration circuitry in FIG. 2 uses a conventional calibrationtechnique. The inventors have recognized and appreciated that, byadapting the circuitry of FIG. 2, edge-sensitive delays can be measured.With these measurements, edge-sensitive calibration can be performed.FIG. 3 illustrates an embodiment of calibration circuitry configured foredge-sensitive delay measurement and edge-sensitive calibration.

The calibration circuitry of FIG. 3 similarly includes a referencecircuit path P₀ and in a circuit path P₁ for which the delay may bemeasured relative to the reference circuit path P₀. Either of the pathsmay be switched into loop 310 by operation of switches S₁ and switchesS₂. Calibration circuitry of FIG. 3 similarly operate by causing asignal to repeatedly propagate around loop 310. Accordingly, a relativedelay in circuit path P₁ may be measured by determining a period of asignal propagating around loop 310. Accordingly, period counter 220 maybe coupled to loop 310. The output of period counter 220 may be read bycalibration processor 330. Like calibration processor 230, calibrationprocessor 330 may be programmed to measure a delay through one or morecircuit paths and determine a calibration value to apply to that circuitpath in order to achieve a desired delay. The process may be performedfor multiple circuit paths to equalize delay through the paths.

However, in contrast to the configuration circuitry illustrated in FIG.2, calibration processor 330 may be configured to determine calibrationvalues that set delay of edges of a particular type propagating throughcircuit path P₁. For example, calibration processor 330 may determine adelay associated with a rising edge propagating through circuit path P₁.In other scenarios, calibration processor 330 may set calibration valuesto calibrate for a delay of a falling edge through circuit path P₁. Yeta further possibility, calibration processor 330 may separately measuredelays associated with a rising edge and a falling edge propagatingthrough circuit path P₁ and set calibration values to achieve a desiredpropagation delay for each of the rising edge and the falling edge. Thesame processing may be repeated for other circuit paths, therebyproviding edge-sensitive calibration of multiple circuit paths.

In the embodiment illustrated, calibration processor 330 is enabled tomeasure edge-sensitive delays through the incorporation of an edgetriggered element within loop 310. The edge triggered element respondsto a trigger edge at its input. The trigger edge may be either a risingedge or a falling edge. In some embodiments, one shot edge triggeredelement 312 may be configurable so as to, at any given time, respond toeither a rising edge or a falling edge, but not both. With such an edgetriggered element in loop 310, calibration processor may calibratecircuit path P₁ for rising edge delays by configuring the edge triggeredelement to respond to rising edges. Calibration processor 33Q may thenreconfigure the edge triggered element to respond to falling edges, andrepeat a delay measurement for calibration of delays associated withpropagation of falling edges.

In the example of FIG. 3, the edge triggered element within loop 310 isa one shot edge triggered element 312. In response to receiving atrigger edge at its input, one shot edge triggered element 312 mayproduce a pulse at its output. The width of the pulse may be dependenton the design of one shot edge triggered element 312 and may beindependent of the format of the input signal to one shot edge triggeredelement 312. Loop 310 may be configured such that each pulse output byone shot edge triggered element 312 and then applied as an input tocircuit path P₁ causes circuit path P₁ to output a signal includinganother trigger edge. In this way, a process by which one shot edgetriggered element 312 repeatedly outputs pulses is initiated. As withloop 210, the period of these pulses may depend on the delay through theelements making up loop 310.

One shot edge triggered element 312 may be constructed in any suitableway. However, the inventors have recognized and appreciated thattraditional one shot circuits may lead to the disappearance of aninitially present loop signal, and that an implementation based on amodified SR flip-flop design may be preferable in some embodiments. AnSR flip-flop has a set input, S, and a reset input, R. In a standard SRflip-flop, when the S input is asserted, the output of the flip-flop isasserted. Conversely, when the reset input is asserted, the output isde-asserted. When neither of the S or R inputs is asserted, the SRflip-flop maintains its state. In a standard SR flip-flop, assertingboth the S and R inputs is not a valid operation. Accordingly, if the Sand R inputs are simultaneously asserted in a standard SR flip-flop, theoutput is indeterminate. An example of an indeterminate output is astate that is in between a logic high level and a logic low level. Ingeneral, an indeterminate output state is any output state that leads tounpredictable behavior of subsequent circuitry.

FIG. 4 illustrates various operating states of a standard SR flip-flop.Timeline 410 illustrates a signal at the S input of a standard SRflip-flop. Timeline 420 illustrates the signal at the R input of the SRflip-flop. In the illustrated example, edge 412 indicates the time atwhich S input is asserted. Accordingly, the output shown on timeline 430has a corresponding edge 432 indicating that the output is set inresponse to the S input being asserted.

In contrast, edge 422 indicates the beginning of a time when the R inputis asserted. Accordingly, the output has a falling edge 434, indicatingthat the output is de-asserted in response to the R input beingasserted.

Timeline 440 illustrates a desired behavior for a true edge triggered SRflip-flop in which the output is set or reset in response to triggeredges in the S and R inputs. The output in a true SR triggered flip-flopmay respond to the most recent trigger edge in either the S or R signal.When the most recent trigger edge occurs on the set input, the output ofa true SR triggered flip-flop will be set. When the most recent triggeredge is on the R input, the output of a true SR edge triggered flip-flopwill be reset.

Timeline 440 illustrates that behavior in response to trigger edges 412and 422 on the S and R inputs, respectively. The output of the true SRedge triggered flip-flop illustrated on timeline 440 is asserted, asillustrated by edge 442 which occurs in response to rising edge 412 onthe S input. The output of the true SR edge triggered flip-flop isde-asserted, as illustrated by falling edge 444, which occurs inresponse to trigger edge 422 of the R input. In the scenario in whichthe S and R inputs do not occur at the same time, the output of thestandard SR flip-flop is the same as a true SR edge triggered flip-flop.However, if the S and R inputs are asserted at the same time, theoperation of a standard SR flip-flop may not match that of a true SRedge triggered flip-flop.

In the scenario illustrated, the S input is de-asserted before the Rinput is asserted at edge 422 such that the S and R inputs are notasserted at the same time. So long as the S and R inputs are notasserted simultaneously, a standard SR flip-flop exhibits an edgetriggered behavior, with the output being asserted in response to arising edge on the S input and is de-asserted in response to a risingedge on the reset input. Other combinations of the S and R input areillustrated in which the S and R inputs are simultaneously asserted. Ifthe S and R inputs are asserted at the same time, a standard SRflip-flop may not exhibit true edge-triggered behavior. FIG. 4 indicatesscenarios in which the S and R inputs occur simultaneously. Thesescenarios can take the form of the R input partially overlapping the Sinput or the S input surrounding the R input. Overlap is illustrated inconnection with rising edges 414 and 424.

Timeline 410 includes an edge 414 at which the S input is asserted.Timeline 420 includes and edge 424 at which the R input is asserted. Incontrast to edge 422, edge 424 occurs at a time T₁ at which S input isstill asserted. Accordingly, though the output of the standard SRflip-flop, as illustrated on timeline 430, has an edge 436 in responseto the S input being asserted, a standard SR flip-flop may maintain thatstate only until time T₁ at which the R input is asserted. At time T₁,lasting until time T₂, both the S and R inputs are asserted.Accordingly, the output of a standard SR flip-flop is indeterminatebetween time T₁ and time T₂. Though, at time T₂ the output resetsbecause the R input remains asserted at time T₂ while the S input isde-asserted.

Timeline 440 represents the output of a prior-art SR flip-flop thatresponds correctly to partially overlapping S and R inputs illustratedon timelines 410 and 420. This latch is disclosed in U.S. Pat. No.6,291,981 B1 by R. A. Sartschev, which is hereby incorporated byreference. In response to a trigger edge 414 on the S input, the outputof the true SR edge triggered flip-flop shows a rising edge 446. Theoutput of the prior-art SR flip-flop stays asserted until the nexttrigger edge on the R input, which is trigger edge 424 in the exampleillustrated. Accordingly, the output of the prior-art SR flip-flop isde-asserted at time T₁ in response to the trigger edge 424 on the Rinput.

Timeline 450 represents a desired behavior of a true SR edge triggeredflip-flop in response to the overlapping S and R inputs illustrated ontimelines 410 and 420, similar to the behavior of the prior-art SRflip-flop. In response to a trigger edge 414 on the S input, the outputof the true SR edge triggered flip-flop shows a rising edge 456. Theoutput of the true SR edge triggered flip-flop stays asserted until thenext trigger edge on the R input, which is trigger edge 424 in theexample illustrated. Accordingly, the output of a true SR edge triggeredflip-flop is de-asserted at time T₁ in response to the trigger edge 424on the R input. In contrast to a standard SR flip-flop in which theoutput is indeterminate during the period of overlap between times T₁and times T₂, the prior-art SR flip-flop and a true SR edge triggeredflip-flop have a de-asserted output between times T₁ and times T₂.

The S input may surround the R input as is illustrated in connectionwith edges 416 and 426. In this example, the S input is asserted at edge416 and stays asserted until time T₅. The R input is asserted time T₃,represented by edge 426. The R input stays asserted until time T₄. Ascan be seen in the surround scenario, a standard SR flip-flop also doesnot exhibit a true edge triggered behavior in which the flip-flopresponds to the most recent edge. As can be seen, in response to edge416 on the S input, the output is asserted with an edge 438. Thisbehavior corresponds to the behavior of a true edge triggered SRflip-flop in which the output depends on the most recently receivededge. Timeline 440 and 450 also illustrate this desired behavior withrising edges 448 and 458 respectively representing the output beingasserted in response to the rising edge 416 of the S input. Asillustrated on timeline 440, in the prior-art SR flip-flop, and ontimeline 450, in a true edge triggered SR flip-flop, the output isde-asserted in response to the next rising edge of the R input. Thisrising edge is shown as edge 426 occurring at time T₃. Accordingly,timeline 440 shows the output of the prior-art SR flip-flop beingde-asserted at time T₃ and timeline 450 shows the output of the true SRtriggered flip-flop being de-asserted at time T₃. In contrast, for aconventional. SR flip-flop this desired behavior may not occur when thereset input is surrounded by the S input. As can be seen, when the Rinput is asserted at rising edge 426, both the S and R inputs areasserted during the time T₃ through time T₄. Rather than being reset asillustrated in timeline 440, the output of a standard SR flip-flop asillustrated in timeline 430, becomes indeterminate in the time betweentimes T₃ and times T₄.

FIG. 4 illustrates a further deviation from the desired behavior when astandard SR flip-flop is used. At time T₄, the reset input isde-asserted. However, the S input remains asserted until time T₅. Duringthe interval time T₄ one time T₅, a standard SR flip-flop will have anasserted output, as illustrated in timeline 430. However, no rising edgeof the set input occurs of the time T₄. Accordingly, as illustrated intimeline 440, the true edge triggered SR flip-flop remains in a resetstate between times T₄ and times T₅.

The prior-art SR flip-flop behaves like a true edge triggered SRflip-flop before time T₄. At time T₄, the reset input is de-asserted.However, the S input asserts at that time and remains asserted untiltime T₅. As in the case of the standard SR flip-flop, during theinterval time T₄ one time T₅, the prior-art SR flip-flop will have anasserted output, as illustrated in timeline 440. This is a deviationfrom the desired true edge triggered behavior.

The inventors have recognized and appreciated that an edge triggeredelement used for edge-sensitive delay measurements, such as edgetriggered element 312 (FIG. 3) may be implemented with a true SRflip-flop having the behaviors illustrated on timeline 440. FIG. 5illustrates a truth table for such an edge triggered element.

FIG. 5 illustrates a truth table for a true edge triggered SR flip-flopthat may be used as part of an edge triggered element in anedge-sensitive delay measurement circuit. An edge triggered SR flip-floplike a conventional SR flip-flop has an S and an R input. The true SRedge triggered flip-flop has an output Q. The truth table of FIG. 5shows values of the output Q at time n. Values of the output Q at time nare indicated in the column headed Qn. Values of the S and R inputs atthe time n are indicated in the columns headed Sn and Rn, respectively.FIG. 5 also shows input values for a time preceding the time n. Thevalues for the S and R inputs at a time preceding time n are indicatedin the columns headed Sn−1 and Rn−1, respectively. In this manner weillustrate transitions on S and R inputs with different values at timesn and n−1. Time n is after the most recent transition while time n−1 isbefore the most recent transition, and only the most recent transitionoccurs between time n−1 and n. The rows 512, 514, 516, 518, 520, 521,522 and 524 represent different combinations of the inputs Sn−1, Rn−1,Sn and Rn. Rows 512 and 514 indicate an operating state in which the setand reset inputs do not overlap. In row 512, the S input is asserted attime n, as indicated by a one in the column headed Sn while the R inputis constant and de-asserted. In response to this combination of inputs,the output is asserted at time n as illustrated by a one in a columnheaded Q_(n).

Row 514 illustrates a behavior when the R input is asserted at time nwhile the S input is constant and de-asserted. As can be seen by thezero in the column headed Qn, the output of true edge triggered SRflip-flop is de-asserted in response to this combination of inputs.

Row 516 indicates a scenario in which there is a rising edge in the Sinput at time n while the R input is constant and asserted. This risingedge can be seen by the value of one in the column headed Sn and thezero in the column headed Sn−1. The asserted output is represented bythe value of one in the column headed Qn.

Row 518 illustrates a scenario in which a rising edge of the R inputoccurs at time n. This rising edge can be seen by a one in the columnheaded Rn in comparison to the value zero in the column headed Rn−1. Noedge has occurred in the set input as can be seen by the value one inboth columns headed Sn and Sn−1. The S input is constant and asserted.

Row 520 indicates a scenario in which the R input is de-asserted at timen, as can be seen by a zero in the column headed Rn and a one in thecolumn headed Rn−1. Though the inputs represented in row 520 include anedge at time n on the R input, in the embodiment illustrated, the SRedge triggered flip-flop is sensitive to a rising edge. The edge in theR input occurring at time n based on the inputs represented in row 520is a falling edge. Accordingly, this edge does not reset the state ofthe flip-flop. Similarly, there is no trigger edge on the S input, ascan be seen by a one in both the columns headed Sn and Sn−1.Accordingly, at time n the output Qn is the same as at time n−1. Thisoutput is indicated by the value Qn−1 in column Qn.

Row 522 similarly illustrates a scenario in which no trigger edge occursat time n such that the output Qn retains its state at Qn−1 since thetransition of the R input involves a falling edge.

Composite row 524 similarly illustrates scenarios in which no triggeredge occurs at time n. In this example in which the trigger edges arerising edges because both the S and R inputs are zero in the statesillustrated in row 524, no change in the output occurs at time n.Therefore, the value of Qn stay the same as the value Qn−1 as indicatedin the column headed Qn.

A circuit element operating according to the truth table of FIG. 5 willimplement the behavior of a true SR edge triggered flip-flop. Anysuitable arrangement of circuit components maybe used to implement acircuit achieving a truth table illustrated in FIG. 5. FIG. 6 providesan example of a suitable arrangement of circuit components. In thisexample, a true edge triggered SR flip-flop is implemented with threelatches, such as a Y latch 610, a Y latch 612, and a Qlatch 614. The Ylatch 610 receives the S and R inputs. Y latch 612 similarly recievesthe S and R inputs. However, the R input is inverted upon application toY latch 612.

The Y latch 610 output Y and the Y latch 612 output X are applied to theQ latch. In addition, the S and R inputs are received by the Q latch toproduce output Q of the true SR edge triggered flip-flop 600.

FIG. 7A illustrates a truth table for the operation of Y latch 610 and Ylatch 612. From the truth table of FIG. 7A it can be seen that the Ylatch 610 and the Y latch 612 behave like an SR flip-flop. However, theoutput of the Y latch 610 and the Ylatch 612 is determinant even whenboth the S and R inputs are asserted simultaneously. As illustrated inFIG. 7A, if the set and reset inputs are both asserted, the Y latchretains its state. This operation is illustrated in row 720. Rows 714,716 and 718 illustrate operating states in which at most one of the Sand R inputs is asserted. These rows represent operation that is thesame as a standard SR flip-flop. When the S input is asserted, theoutput Y is asserted, as illustrated by row 716. Conversely, when theinput R is asserted, the output Y is de-asserted as indicated by row718. When neither the S nor R input is asserted, the output Y retainsits state, as indicated by the value Yn−1 in row 714.

FIG. 7A also displays up front a column of assertions that are logicallyequivalent to the indicated values of Sn and Rn in the same row, wherein general * stands for a logical AND operation and + for a logical ORoperation. Although in this Y latch table no particular simplificationis evident, this notation may clarify the meaning of more complex truthtables, as will become clear for the Q latch 614.

FIG. 7B illustrates a truth table for the operation of Q latch 614. TheQ latch 614 does not represent an operation that is the same as astandard SR flip-flop. As illustrated in FIG. 7B it can be seen thatwhen S*(Xb+Yb), or (NOT S) AND ((not X) OR (not Y)), is asserted, theoutput Q is asserted, as illustrated by composite row 722. Conversely,when R*(Xb+Y), or (NOT R) AND ((NOT X) OR (NOT Y)), is asserted, theoutput Q is de-asserted as indicated by composite row 724. When(Sb+Rb)*X+Sb*Rb, or (((NOT S) OR (NOT R)) AND X) OR ((NOT S) AND (NOTR)), is asserted, the output Q retains its state, as indicated by thevalue of Qn−1 in row 726.

The example circuit in FIG. 6 together with the truth tables in FIG. 7Aand in FIG. 7B results in the complete truth table illustrated in FIG.5, demonstrating that its operation represents that of a true edgetriggered SR flip-flop.

In some embodiments, a Y latch may be constructed using an arrangementof transistors similar to that used in forming a standard SR flip-flop.The specific circuit designed may be adapted to accommodate for theoperating state illustrated in row 720. However, any suitable circuitdesign may be used to implement a Y latch.

In some embodiments, a Q latch may be constructed using a similar yetmore complex arrangement of transistors than that of the Y latch or astandard SR flip-flop. The specific circuit may be adapted toaccommodate for the operating state illustrated in rows 722, 724, and726. However, any suitable circuit design may be used to implement a Qlatch.

Regardless of how a true edge-triggered flip-flop is implemented, such adevice may be used for edge-sensitive delay measurements. FIG. 8illustrates circuitry for measuring edge-sensitive delays using a trueSR edge triggered flip-flop. The circuitry of FIG. 8 may be used tomeasure delays in any one or more circuit paths. In the embodimentillustrated, circuit paths P₀ . . . P_(N) are illustrated. Circuit pathP₀ may represent a reference circuit path. The other circuit paths, suchas circuit paths P₁ . . . P_(N), may represent circuit paths to becalibrated to remove differences in edge-sensitive delays among thecircuit paths.

The specific function of the circuit paths P₁ . . . P_(N) may depend onthe nature of the electronic system in which the circuitry of the FIG. 8is applied. For example, if applied in connection with a test system 100(FIG. 1A), each of the circuit paths P₁ . . . P_(N) may represent aportion of the circuitry within a channel of the automatic test system.The portions represented by circuit paths P₁ . . . P_(N), for example,be portions of digital channels controlled by a common pattern generatorsuch as is illustrated in FIG. 1B. However, it should be appreciatedthat this specific structure or function of the circuit paths P₀ . . .P_(N) is not critical to the invention, and edge-sensitive delaymeasurements and calibration may be employed with any suitable type ofcircuit paths. As with the embodiment of FIG. 3, a path for which delayis to be measured maybe selectively switched into a loop 810. In theexample illustrated in FIG. 8, the switching is achieved byde-multiplexer 822 and multiplexer 824. Control signals rlf_pre_selectand rlf_post_select may be applied to de-multiplexer 822 and multiplexer824, respectively, to control which of the circuit paths P₀ . . . P_(N)is connected in loop 810. These control signals rlf_pre_select andrlf_post_select may be generated by any suitable component, such as acalibration processor 330 (FIG. 3). These control signals may beconfigured such that de-multiplexer 822 and multiplexer 824 uniquelyselect one of the circuit paths P₀ . . . P_(N).

The loop 810 may be configured such that a one shot edge triggeredelement 812 is included in loop 810. For flexibility, the circuitillustrated in FIG. 8 includes components that control whether one shotedge triggered element 812 is included in loop 810 and even whether loop810 is formed. One component that controls whether a loop is formed isAND gate 826.

AND gate 826 may, based on the input rlf_en, selectively form loop 810.When the signal rlf_en, coupled to a first input of AND gate 826, isasserted, the output of AND gate 826 will depend on the value of thesignal applied at the second input of AND gate 826. If the signal at thesecond input of AND gate 826 is asserted, the output of AND gate 826will also be asserted. Conversely, if the signal at the second input ofAND gate 826 is not asserted, the output of AND gate 826 will similarlynot be asserted. In this way, AND gate 826 will pass through a signal atthe second input of AND gate 826 when the signal rlf_en is asserted.

If the signal rlf_en is not asserted, the output of AND gate 826 willremain in a deasserted state, regardless of the state of the signal atthe second input to AND gate 826.

In this way, AND gate 826 will selectively pass the output ofmultiplexer 824 allowing loop 810 when signal rlf_en is asserted. Nosignal will propagate when rlf_en is not asserted.

The signal rlf_en may be controlled by any suitable component, such asby calibration processor 330 (FIG. 3). Calibration process 330 mayassert rlf_en while the circuitry of FIG. 8 is used for delaymeasurement. When not in use for delay measurement, the signal rlf_enmay be deasserted, preventing signals from being formed in loop 810,which could interfere with other elements of the electronic device inwhich the circuitry of FIG. 8 is included.

FIG. 8 also illustrates components and control signals that may be usedfor determining whether the circuitry of FIG. 8 provides anedge-sensitive delay measurement or a conventional delay measurement. Inthis example, loop 810 includes a multiplexer 828. Multiplexor 828 isconfigured to select a signal to propagate around loop 810. In thescenario illustrated, multiplexer 828 selects from between an output ofedge triggered element 812 and the signal along path 814. Whenmultiplexer 828 is controlled to select the output of edge triggeredelement 812, the circuitry of FIG. 8 will be configured to propagatesignals around loop 810 at times synchronized with trigger edges for theedge triggered element 812. Accordingly, by operation of multiplexer828, loop 810 may have a configuration similar to that of loop 310 (FIG.3), which provides edge-sensitive delay measurements.

Conversely, when multiplexer 828 selects path 814, some delay in thesignals propagating around loop 810 may be created along path 814. Inaddition, the loop 810 will have an inversion caused by demultiplexer822 having an inverting input. Accordingly, when multiplexer 828 selectsas its input path 814, loop 810 may have a configuration similar to loop210 (FIG. 2). That loop is configured for measuring a delay equal to thesum of the delay for a rising edge and the delay for a falling edge, sotwice the average delay of rising and falling edges, as in aconventional system.

In this way, by control of multiplexer 828, the circuitry of FIG. 8 maybe configured to perform a conventional delay measurement or may beconfigured to perform an edge-sensitive delay measurement. For anedge-sensitive delay measurement, edge triggered element 812 is includedin the loop. For a conventional delay measurement, edge triggeredelement 812 is not used. Accordingly, FIG. 8 illustrates that thecontrol signal applied to multiplexer 828 to control whether edgetriggered element 812 is included in loop 810 also controls whether edgetriggered element 812 receives power. As shown, control signalrlf_edge_en is configured to disable the power to edge triggered element812 when multiplexer 828 selects circuit path 814 for inclusion in loop810. This capability is optional, but may reduce power consumed by anelectronic device incorporating the circuitry of FIG. 8 and may reducethe generation of noise which could interfere with operation of otherportions of the electronic device. The signal rlf_edge_en may beprovided in any suitable way. Though, in some embodiments, the controlsignal rlf_edge_en may be provided by a calibration processor, such ascalibration processor 330 (FIG. 3). For simplicity no other powerreducing options are shown in FIG. 8, although such options may be addedwithout changing the fundamental operation of the circuitry whenactivated.

Edge triggered element 812 may be implemented in any suitable way. Inthe embodiment illustrated, edge triggered element includes a true RSedge triggered flip-flop 832. True RS edge triggered flip-flop 832 mayimplement a truth table as is illustrated in FIG. 5. Such a componentmay be implemented with the circuit architecture illustrated in FIG. 6.However, any suitable edge triggered element may be used. In the exampleof RS edge triggered flip-flop 832 includes an R and an S input. Circuitcomponents may be used with flip-flop 832 to control its operation. ANDgates 836 and 838 are connected to the R and S inputs, respectively. ANDgates 836 and 838 may be controlled to selectively allow or blocksignals from being applied to the R and S inputs. In the example of FIG.8, a control signal rlf_edge_start is provided as an input to each ofAND gates 836 and 838. When the signal rlf_edge_start is asserted, ANDgates 836 and 838 will pass whatever signal is applied to the otherinput of each of AND gates 836 and 838. Conversely, when the controlsignal rlf_edge_start is deasserted, AND gates 836 and 838 will maintainthe outputs of AND gates 836 and 838 in the deasserted state.Accordingly, no edges will be coupled to the R and S inputs of true RSedge triggered flip-flop 832, and the flip-flop 832 will not changestate, effectively disabling edge-triggered element 812 from producingany output.

In addition, using two AND gates for the disabling purpose may create awell defined initial state (S,R)=(0,0) when ref_edge_start is asserted.Note that the initial state of Q may be unknown, especially if theedge-triggered one-shot 812 just powered up. Once the system is thusenabled, and assuming external loop selections have been made, only oneof inputs S and R will assert, which one depending on the initial stateof Q. This avoids an undesired initial state (S,R,Q)=(1,1,0), whichcould evolve into (S,R,Q)=(1,0,0) if path 834 back to input R has ashorter delay than the loop back to input S involving the external delayto be measured. The state (S,R,Q)=(1,0,0) is a stable state of theflip-flop 832 that does not lead to periodic signals.

In the embodiment illustrated in FIG. 8, edge triggered element 812 is aone shot edge triggered element. In response to a trigger edge appliedat an input to edge triggered element 812, the output of edge triggeredelement 812 will be a pulse with a similar trigger edge synchronizedwith the trigger edge of the input. That pulse will have a durationestablished by the operation of one shot edge triggered element 812. Inthe embodiment illustrated in FIG. 8, a pulse of a fixed duration iscreated by delay element 834 in a feedback path between the output and rinput of true RS edge triggered flip-flop 832. In the embodimentillustrated, true RS edge triggered flip-flop 832 is triggered on risingedges. Accordingly, a rising edge applied at the S input will result inthe output Q being asserted. This asserted value will propagate throughdelay element 834, presenting a rising edge at the R input. The risingedge at the R input will deassert the output Q. Because flip-flop 832 isa true RS edge triggered flip-flop, the output Q will be deasserted uponreceipt of the trigger edge at the R input, regardless of the state ofthe S input. This R input will be received an amount of time after thetrigger edge at the S input that is determined by the amount of delay indelay element 834. Accordingly, the amount of delay introduced by delayelement 834 controls the width of the pulse at the Q output in responseto a rising edge at the S input of true RS edge triggered flip-flop 832.

Any suitable amount of delay may be introduced in any suitable way bydelay element 834. In some embodiments, delay element 834 may beconstructed of a small number of logic gates, similar to delay chain 212(FIG. 2) or other circuitry to introduce a delay, in this case with nonet inversion.

In the embodiment illustrated, RS edge triggered flip-flop 832 istriggered on a rising edge applied to its S input. However, edgetriggered element 812 may be controlled to respond to any suitabletrigger edge. The trigger edge may be either a rising edge or a fallingedge. Moreover, because edge triggered element 812 is configurable, itcan be configured at some times to respond to rising edges and at othertimes to respond to falling edge. This capability allows the samecircuitry to be used for measuring, and therefore calibrating for,edge-sensitive delays associated with either rising edges or fallingedges or both.

Control of the polarity of the trigger edge for edge triggered element812 may be achieved through a control signal rlf_edge_pol. In theembodiment illustrated, when the signal rlf_edge_pol is deasserted, arising edge at the input of edge triggered element 812 is coupledthrough XOR gate 842 to the S input of true RS edge triggered flip-flop832 as a rising edge. In this state, edge triggered element 812 respondsto a rising edge. Conversely, when control signal rlf_edge_pol isasserted, XOR gate 842 operates to invert the input to edge triggeredelement 812. Accordingly, a falling edge at the input of edge triggeredelement 812 is coupled to the S input of true RS edge triggeredflip-flop 832 as a rising edge, but a rising edge at the input of edgetriggered element 812 is coupled through as a falling edge. In this way,true RS edge triggered flip-flop 832 responds to a falling edge at theinput of edge triggered element 812.

A similar polarity inversion occurs at the output of true RS edgetriggered flip-flop 832. When control signal rlf_edge_pol is deasserted,XOR gate 844 couples through the output of true RS edge triggeredflip-flop 832. Accordingly, a rising edge at the Q output of RS edgetriggered element 832 appears as a rising edge at the output of edgetriggered element 812. Conversely, when the control signal rlf_edge_polis asserted, XOR gate 844 inverts the value at the output Q of true RSedge triggered flip-flop 832. In this way, a falling edge is produced insynchronization with the falling edge acting as a trigger edge for edgetriggered element 812. This falling edge is then coupled back throughloop 810.

Regardless of the manner in which the components within loop 810 areconfigured, signals will propagate around loop 810, changing the stateat node 850 for each pass of a signal around loop 850. As describedabove in connection with FIGS. 2 and 3, the time between these passesdepends on the total delay in loop 810. Accordingly, the period betweensignals detected at node 850 is an indication of the amount of delayintroduced into loop 810 by one of the circuit paths P_(O) . . . P_(N)switched into loop 810. The time difference may be measured in anysuitable way. In some embodiments, a period counter, such as periodcounter 220 (FIG. 3) may be used.

Though, it should be appreciated that there is a relationship betweenperiod and frequency such that any element that can measure frequencymay also be used to measure the period between successive passes of asignal propagating around loop 810. Accordingly, FIG. 8 shows that node850 is coupled to a frequency counter. Though, it should be appreciatedthat any component that directly or indirectly measures the propagationtime of a signal around loop 810 may be coupled to node 850, or anyother suitable node in the circuitry illustrated in FIG. 8.

In this way, the circuitry illustrated in FIG. 8 may be used as part ofa calibration system in an electronic device. The control signalsillustrated in FIG. 8 may be generated by a calibration processor, suchas calibration processor 330 (FIG. 3) or any other suitable component.The calibration processor may generate signals to measure edge-sensitivedelays in a reference path P₀ and in each of the other paths P₁ . . .P_(N). The calibration processor may, based on differences in measuredpropagation delays, select calibration values for each of the circuitpaths P₁ . . . P_(N). The selected values may adjust for edge-sensitivedelays for either a rising edge, a falling edge, or both. Thesecalibration values may then be applied to the circuit paths as describedabove in connection with FIG. 3. Though, as noted above, the circuitryof FIG. 8 also may be controlled to measure delays through the circuitpaths P₀ . . . P_(N) using conventional delay measurement techniques.Accordingly, the calibration processor may be configured toalternatively or additionally measure average delays, not tied to aspecific edge, through the circuit paths and adjust for those delays asdescribed above in connection with FIG. 2. In this way, substantialflexibility may be provided in calibrating for delays in the circuitpaths. This flexibility enables delay measurement and calibrationtechniques as described herein to be applied in many types of systems.For example, calibration techniques as described herein may be used in amanufacturing process for semiconductor devices. Timing accuracy can bevaluable in systems testing devices during their manufacture becausetiming inaccuracy increases the number of semiconductor devices, thatare actually operating within specification, but are classified asoperating improperly. For example, if an expected response is detectedat approximately the expected time, the test system may nonetheless flagthe semiconductor device as faulty or as questionable, if the testsystem cannot accurately determine whether the actual time at which theresponse occurred is within a window of time allowed per the devicespecification. When the measured time of an expected response is closerto the end of the allowed window than the timing accuracy of the testsystem, the device may be flagged as faulty.

Better timing accuracy, which may be achieved by better calibration, canreduce the number of devices falling into this category. Bettercalibration may be provided by a method of edge-sensitive calibration asdescribed herein that techniques may be used to calibrate automatic testequipment that is used as part of the manufacturing of semiconductordevices. Actions in the manufacturing process may then be conditionallyperformed based on test results.

The conditional actions may relate to individual devices or may relateto the manufacturing process as a whole. For example, test results aresometimes used in a manufacturing process to “bin” individual devices.In some scenarios, two bins may be provided, corresponding to good orbad devices. Devices that pass all tests may be assigned to the good binand may be further processed, such as by sealing them in device packagesand preparing them for shipment to customers. Conversely, devices thatfail one or more tests may be marked for later identification at a pointwhere they can later be removed from the manufacturing flow anddiscarded.

In some scenarios, more than two bins may be provided, corresponding tomultiple levels of performance. A device, for example, may pass alltests when operated at low frequencies, but may fail tests when operatedat a higher frequency. Such a device may be assigned to a low speed bin.That device may be packaged and labeled differently than a fullyfunctional device so that the device can be sold as a low speed device.A similar binning operation may be performed for devices containingmemory arrays. A flaw in the memory array on a device revealed duringtesting may limit the usable size of the memory array. Such a device maynonetheless be binned for subsequent labeling and sale as a device witha smaller memory array.

Other types of operations may also be conditionally performed based ontest results. For example, some devices are manufactured with redundantcircuits. Testing may reveal a defect that can be repaired bysubstituting a redundant circuit for a faulty circuit. Test results maybe used to conditionally route defective but repairable devices to arepair station where alterations on the device may result in a fullyfunctional device, or at least a device that can be sold with a degradedperformance specification.

Other operations conditionally taken based on test results may affectthe manufacturing process as a whole. For example, test resultsrevealing a growing failure in a manufacturing line rate may signify apiece of equipment that is contaminated or requires adjustment.Accordingly, the conditional actions taken based on test results mayinclude cleaning or adjusting manufacturing equipment.

Having thus described several aspects of at least one embodiment of thisinvention, it is to be appreciated that various alterations,modifications, and improvements will readily occur to those skilled inthe art.

For example, one shot edge triggered element 312 within loop 310 may berealized in ways not involving an SR flip-flop, such as the traditionalmanner of a two-input AND gate with one input being the signal and theother input being a delayed and inverted copy of the input signal. Thisis a simple combinatorial circuit having no internal memory. As is wellknown, for sufficiently long input pulses, this circuit may generate anoutput pulse of width approximately equal to the intentional delay ofthe inverted input. However, the behavior is modified if the input pulseis shorter than the intentional delay in the circuit. For such shorterinputs, the output pulse may attain a width approximately equal to thewidth of the input pulse rather than the width of the intentional delay.Thus, for short pulses, the combinatorial one shot circuit might behavelike a pure delay. If circuit path P1 in FIG. 3 has a longer delay for arising edge signal than for a falling edge signal, it may reduce thewidth of an incoming pulse. Therefore a pulse of a certain width at theoutput of the mentioned simple one shot circuit may return to its inputwith a reduced pulse width. After multiple round trips the consistentpulse width reduction may lead to a complete disappearance of thesignal. Though, this deficiency may be removed by the addition of apulse-stretching circuit. Such circuits are also well-known and as longas the pulse stretching amount is larger than any anticipated pulseshrinking in the signal loop return path, the circuit may sustain adesired persistent oscillation signal. This may limit the generality ofthe circuit's applicability, since adaptation to the design is requiredbased on the anticipated delays to be measured, but it may be used incases where sufficient knowledge is available about the pulse widthmodifying behavior of the delays to be measured.

As another example, circuitry that responded to a rising edge was usedas an example of edge triggered circuitry. It should be appreciated thatedge triggered circuitry may be designed such that a trigger edge may beeither a rising or falling edge.

As a further example, it should be appreciated that, though theinvention is illustrated in connection with automatic test equipmentused in the manufacture of semiconductor devices, the invention is notso limited. Embodiments of the invention may be used in connection withtest equipment of any suitable type or in other types of systems.

As yet another example, the period counter, the calibration processorand any requisite additional circuitry, such as shown in FIGS. 1B and 2,or portions thereof, may be implemented in a single highly integratedelectronic circuit that is part of the automated test equipment or otherapparatus that requires calibration of signal delay paths.

Such alterations, modifications, and improvements are intended to bepart of this disclosure, and are intended to be within the spirit andscope of the invention. Further, though advantages of the presentinvention are indicated, it should be appreciated that not everyembodiment of the invention will include every described advantage. Someembodiments may not implement any features described as advantageousherein. Accordingly, the foregoing description and drawings are by wayof example only.

The above-described embodiments of the present invention can beimplemented in any of numerous ways. For example, the embodiments may beimplemented using hardware, software or a combination thereof. Whencontrolled in software, the software code can be executed on anysuitable processor or collection of processors, whether provided in asingle computer or distributed among multiple computers. Such processorsmay be implemented as integrated circuits, with one or more processorsin an integrated circuit component. Though, a processor may becontrolled using circuitry in any suitable format.

Further, it should be appreciated that a computer may be embodied in anyof a number of forms, such as a rack-mounted computer, a desktopcomputer, a laptop computer, or a tablet computer. Additionally, acomputer may be embedded in a device not generally regarded as acomputer but with suitable processing capabilities, including a PersonalDigital Assistant (PDA), a smart phone or any other suitable portable orfixed electronic device.

Also, a computer may have one or more input and output devices. Thesedevices can be used, among other things, to present a user interface.Examples of output devices that can be used to provide a user interfaceinclude printers or display screens for visual presentation of outputand speakers or other sound generating devices for audible presentationof output. Examples of input devices that can be used for a userinterface include keyboards, and pointing devices, such as mice, touchpads, and digitizing tablets. As another example, a computer may receiveinput information through speech recognition or in other audible format.

Such computers may be interconnected by one or more networks in anysuitable form, including as a local area network or a wide area network,such as an enterprise network or the Internet. Such networks may bebased on any suitable technology and may operate according to anysuitable protocol and may include wireless networks, wired networks orfiber optic networks.

Also, the various methods or processes outlined herein may be controlledby software that is executable on one or more processors that employ anyone of a variety of operating systems or platforms. Additionally, suchsoftware may be written using any of a number of suitable programminglanguages and/or programming or scripting tools, and also may becompiled as executable machine language code or intermediate code thatis executed on a framework or virtual machine.

In this respect, the invention may be embodied as a computer readablestorage medium (or multiple computer readable media) (e.g., a computermemory, one or more floppy discs, compact discs (CD), optical discs,digital video disks (DVD), magnetic tapes, flash memories, circuitconfigurations in Field Programmable Gate Arrays or other semiconductordevices, or other tangible computer storage medium) encoded with one ormore programs that, when executed on one or more computers or otherprocessors, perform methods that implement the various embodiments ofthe invention discussed above. As is apparent from the foregoingexamples, a computer readable storage medium may retain information fora sufficient time to provide computer-executable instructions in anon-transitory form. Such a computer readable storage medium or mediacan be transportable, such that the program or programs stored thereoncan be loaded onto one or more different computers or other processorsto implement various aspects of the present invention as discussedabove. As used herein, the term “computer-readable storage medium”encompasses only a computer-readable medium that can be considered to bea manufacture (i.e., article of manufacture) or a machine. Alternativelyor additionally, the invention may be embodied as a computer readablemedium other than a computer-readable storage medium, such as apropagating signal.

The terms “program” or “software” are used herein in a generic sense torefer to any type of computer code or set of computer-executableinstructions that can be employed to program a computer or otherprocessor to implement various aspects of the present invention asdiscussed above. Additionally, it should be appreciated that accordingto one aspect of this embodiment, one or more computer programs thatwhen executed perform methods of the present invention need not resideon a single computer or processor, but may be distributed in a modularfashion amongst a number of different computers or processors toimplement various aspects of the present invention.

Computer-executable instructions may be in many forms, such as programmodules, executed by one or more computers or other devices. Generally,program modules include routines, programs, objects, components, datastructures, etc. that perform particular tasks or implement particularabstract data types. Typically the functionality of the program modulesmay be combined or distributed as desired in various embodiments.

Various aspects of the present invention may be used alone, incombination, or in a variety of arrangements not specifically discussedin the embodiments described in the foregoing and is therefore notlimited in its application to the details and arrangement of componentsset forth in the foregoing description or illustrated in the drawings.For example, aspects described in one embodiment may be combined in anymanner with aspects described in other embodiments.

Also, the invention may be embodied as a method, of which an example hasbeen provided. The acts performed as part of the method may be orderedin any suitable way. Accordingly, embodiments may be constructed inwhich acts are performed in an order different than illustrated, whichmay include performing some acts simultaneously, even though shown assequential acts in illustrative embodiments.

Use of ordinal terms such as “first,” “second,” “third,” etc., in theclaims to modify a claim element does not by itself connote anypriority, precedence, or order of one claim element over another or thetemporal order in which acts of a method are performed, but are usedmerely as labels to distinguish one claim element having a certain namefrom another element having a same name (but for use of the ordinalterm) to distinguish the claim elements.

Also, the phraseology and terminology used herein is for the purpose ofdescription and should not be regarded as limiting. The use of“including,” “comprising,” or “having,” “containing,” “involving,” andvariations thereof herein, is meant to encompass the items listedthereafter and equivalents thereof as well as additional items.

What is claimed is:
 1. Apparatus for determining delay along at leastone circuit path, the apparatus comprising: circuitry configured to forma loop containing the at least one circuit path, the circuitrycomprising: an edge-triggered element; and a period measuring elementcoupled to the loop; wherein the edge-triggered element responds toeither a rising trigger edge or falling trigger edge, but not both, of asignal in the loop.
 2. The apparatus of claim 1, wherein: theedge-triggered element comprises an S-R latch.
 3. The apparatus of claim2, wherein: the S-R latch has a set input and a reset input and anoutput; and the apparatus further comprises: a delay element coupledbetween the output of the S-R latch and the reset input.
 4. Theapparatus of claim 1, wherein: the S-R latch responds to a first pulseat the reset input and a second pulse at the set input by producing anoutput pulse, wherein the output pulse sets and resets based on the lasttrigger edge between the first pulse and the second pulse.
 5. Theapparatus of claim 3, wherein: one of the first pulse and the secondpulse is surrounded by another one of the first pulse and the secondpulse.
 6. The apparatus of claim 4, wherein: one of the first pulse andthe second pulse overlaps with another one of the first pulse and thesecond pulse.
 7. The apparatus of claim 1, wherein: the at least onecircuit path comprises a plurality of circuit paths; and the loopfurther comprises: a multiplexer; and a demultiplexer, wherein themultiplexer and demulitplexer are configured to selectively connect inthe loop a circuit path of the plurality of circuit paths.
 8. Theapparatus of claim 7, wherein: the period measuring element comprises afrequency counter; and the apparatus further comprises a controlcomponent for comparing a frequency determined by the frequency counterwith a first of the plurality of paths connected in the loop with afrequency determined by the frequency counter with a second of theplurality of paths connected in the loop.
 9. The apparatus of claim 1,further comprising: a gate connected to an input of the edge triggeredelement, the gate comprising an output, a first input and a secondinput, the first input and the output of the gate being connected in theloop, and the gate being adapted to: provide at the output of the gate asignal in a first state in response to a signal of the first state atthe first input when a signal at the second input is in the first state;and provide at the output of the gate a signal in the first state inresponse to a signal of a second state at the first input when a signalat the second input is in the second state.
 10. The apparatus of claim9, wherein: the gate is a first gate; the apparatus comprises a secondgate connected to an output of the edge triggered element, the secondgate comprising an output, a first input and a second input, the firstinput and the output of the second gate being connected in the loop, andthe second gate being adapted to: provide at the output of the secondgate a signal in a first state in response to a signal in the firststate at the first input of the second gate when a signal at the secondinput of the second gate is in the first state; and provide at theoutput of the second gate a signal in the first state in response to asignal of a second state at the first input of the second gate when asignal at the second input of the second gate is in the second state,wherein the second input of the second gate is coupled to the secondinput of the first gate.
 11. The apparatus of claim 1, furthercomprising: a switching element configured to selectively connect anddisconnect the edge-triggered element from the loop.
 12. The apparatusof claim 1, wherein: the edge triggered element comprises a one shotcircuit.
 13. The apparatus of claim 12, wherein: the edge triggeredelement further comprises a pulse stretching circuit.
 14. The apparatusof claim 1, wherein: the edge triggered element comprises: a set inputand a reset input and an output; a first latch comprising a first inputcoupled to the set input, a second input coupled to the reset input anda first latch output; a second latch comprising a first input coupled tothe set input, second input coupled to the reset input through aninverting element and a second latch output; and a third latch having afirst input coupled to the set input, a second input coupled to thereset input, a third input coupled to the first latch output, and afourth input coupled to the second latch output.
 15. The apparatus ofclaim 1, wherein: the edge triggered element comprises a set input and areset input and an output; the output is coupled to the reset inputthrough a delay; and the edge triggered element is configured to hold avalue at the output upon transition from a state in which both the setinput and reset input are asserted to a subsequent state in which onlyone of the set input and reset inputs is asserted.
 16. The apparatus ofclaim 15, wherein: the edge triggered element is further configured toinvert the value at the output upon transition from a state in whichonly one of the set input and reset input is asserted to a subsequentstate in which both of the set input and reset inputs is asserted. 17.The apparatus of claim 16, wherein: the edge triggered element isfurther configured to assert the value at the output upon transitionfrom a state in which one or none of the set input and reset input isasserted to a subsequent state in which the set input is asserted. 18.The apparatus of claim 17, wherein: the edge triggered element isfurther configured to de-assert the value at the output upon transitionfrom a state in which one or none of the set input and reset input isasserted to a subsequent state in which the reset input is asserted. 19.A method for measuring edge-specific delay along at least one circuitpath, the method comprising: connecting a circuit path of the at leastone circuit path in at least one loop; measuring a first frequency atwhich a first type pulse traverses a loop of the at least one loop, thepulse of the first type being generated synchronous with a first edge ofa signal traversing the circuit path; and measuring a second frequencyat which a second type pulse traverses a loop of the at least one loop,the pulse of the second type being generated synchronous with a secondedge of a signal traversing the circuit path.
 20. The method of claim19, wherein: measuring the first frequency comprises: at a first time:configuring an element to output a pulse in response to an edge of afirst polarity, the element being connected in a loop of the at leastone loop; and measuring a first frequency of oscillation in the loop;and measuring the second frequency comprises: at a second time:configuring the element to output a pulse in response to an edge of asecond polarity; and measuring a second frequency of oscillation in theloop.
 21. The method of claim 19, further comprising: storing at leastone calibration value to adjust the circuit path based on the firstfrequency of oscillation and the second frequency of oscillation. 22.The method of claim 21, wherein: storing the at least one calibrationvalue separately adjusts: a delay of a rising edge of a signalpropagating along the circuit path based on the first frequency; and adelay of a falling edge of a signal propagating along the circuit pathbased on the second frequency.
 23. The method of claim 21, wherein:storing the at least one calibration value comprises storing at leastone calibration value that controls an input offset for at least onedifferential stage in the circuit path.
 24. The method of claim 19,wherein: the at least one circuit path comprises a plurality of circuitpaths in an automatic test system; the method further comprises,successively, for each of the plurality of circuit paths: connecting thecircuit path in the loop of the at least one loop; performing the act ofmeasuring the first frequency and the act of measuring the secondfrequency for the loop; and adjusting the circuit path based on themeasured first frequency and the measured second frequency.
 25. A methodof manufacturing a semiconductor device, the method comprising:calibrating the automatic test system in accordance with the method ofclaim 23; testing the semiconductor device with the calibrated testsystem; and selectively processing the semiconductor device based on aresult of the testing.
 26. An integrated circuit, comprising a circuitpath, the circuit path comprising a calibration element; calibrationcircuitry connectable in a loop incorporating the circuit path, thecalibration circuitry comprising: an edge-triggered element; andcircuitry configured to measure a rate at which an edge propagatesaround the loop.
 27. The integrated circuit of claim 26, wherein: theedge-triggered element comprises an S-R latch having a set input and areset input and an output; the calibration circuitry further comprises adelay element coupled between the output of the S-R latch and the resetinput.
 28. The integrated circuit of claim 27, wherein: the S-R latchresponds to a pulse at the reset input surrounded by a pulse at the setinput with one pulse at the output, the pulse at output extending from arising edge of the pulse at the set input to a rising edge of the pulseat the reset input.
 29. The integrated circuit of claim 26, wherein: thecircuit path comprises a first end and a second end; and the calibrationcircuitry further comprises: a first switching element configured toselectively couple the first end of the circuit path to the calibrationcircuitry; and a second switching element configured to selectivelycouple the second end of the circuit path to the calibration circuitry.30. The integrated circuit of claim 29, wherein: the integrated circuitis a digital pin electronics chip comprising a plurality of circuitpaths, each having a first end and a second end; the first switchingelement comprises a multiplexer, configured to selectively couple thefirst ends of the plurality of circuit paths to the calibrationcircuitry; and the second switching element comprises a demultiplexerconfigured to selectively couple the second ends of the plurality ofcircuit paths to the calibration circuitry.
 31. A test system comprisinga plurality of the digital pin electronic chips of claim 30.